Title :
Temperature Sensor Using Quartz Tuning Fork Resonator
Author :
Ueda, Toshitsugu ; Kohsaka, Fusao ; Iino, Toshio ; Yamazaki, Daisuke
Keywords :
Anisotropic magnetoresistance; Differential equations; Etching; Hysteresis; Lithography; Research and development; Resonant frequency; Temperature sensors; Thermal sensors; Vibrations;
Conference_Titel :
40th Annual Symposium on Frequency Control. 1986
Conference_Location :
Philadelphia, Pennsylvania, USA
DOI :
10.1109/FREQ.1986.200946