Title :
Dual Stripe Sensor for in Contact Thermal Asperity Testing with Picosliders
Author :
Gatzen, H.H. ; Schwabe, M.K.
Author_Institution :
Inst. for Microtechnology
Keywords :
Capacitance measurement; Particle measurements; Pollution measurement; Surface contamination; Testing; Thermal sensors;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.742316
