Investigations of Fly Height Changes Due to Small Particles using Capacitance Measurements

Author

Raman, Vasumathi ; Jen, David ; Dorius, L. ; Gillis, D.R. ; Feliss, B.A. ; Wolter, R.F.

Author_Institution

IBM Corp.

fYear

1998

fDate

6-9 Jan. 1998

Firstpage

250

Lastpage

250

Keywords

Capacitance measurement; Particle measurements; Pollution measurement; Surface contamination;

fLanguage

English

Publisher

ieee

Conference_Titel

MMM-Intermag Conference, 1998. Abstracts., The 7th Joint

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-5118-5

Type

DOI

10.1109/INTMAG.1998.742318

Filename

742318

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