DocumentCode :
2509775
Title :
Etch Channels in Single Crystal Cultured Quartz
Author :
Johnson, Gary R. ; Irvine, Robert A.
fYear :
1987
fDate :
27-29 May 1987
Firstpage :
175
Lastpage :
182
Keywords :
Capacitive sensors; Costs; Electronics industry; Electrons; Etching; Manufacturing processes; Optical microscopy; Optical resonators; Stress; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
41st Annual Symposium on Frequency Control. 1987
Conference_Location :
Philadelphia, Pennsylvania, USA
Type :
conf
DOI :
10.1109/FREQ.1987.201020
Filename :
1537960
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2509775
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