DocumentCode
2510374
Title
Thin Film Resonator Technology
Author
Lakin, K.M. ; Kline, G.R. ; Ketcham, R.S. ; Landin, A.R. ; Burkland, W.A. ; McCarron, K.T. ; Braymen, S.D. ; Burns, S.G.
fYear
1987
fDate
27-29 May 1987
Firstpage
371
Lastpage
381
Keywords
Band pass filters; Frequency; Integrated circuit technology; Materials processing; Oscillators; Piezoelectric films; Semiconductor thin films; Substrates; Thin film devices; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
41st Annual Symposium on Frequency Control. 1987
Conference_Location
Philadelphia, Pennsylvania, USA
Type
conf
DOI
10.1109/FREQ.1987.201049
Filename
1537989
Link To Document