CMOS compatible generic batch process towards flexible memory on bulk monocrystalline silicon (100)

Author

Ghoneim, Mohamed ; Rojas, Jhonathan ; Kutbee, Arwa ; Hanna, Amir ; Hussain, Mutawarra

Author_Institution

Comput. Electr. Math. Sci. & Eng. Div., King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia

fYear

2014

fDate

20-22 Dec. 2014

Firstpage

655

Lastpage

658

Abstract

Today´s mainstream flexible electronics research is geared towards replacing silicon either totally, by having organic devices on organic substrates, or partially, by transferring inorganic devices onto organic substrates. In this work, we present a pragmatic approach combining the desired flexibility of organic substrates and the ultra-high integration density, inherent in silicon semiconductor industry, to transform bulk/inflexible silicon into an ultra-thin mono-crystalline fabric. We also show the effectiveness of this approach in achieving fully flexible electronic systems. Furthermore, we provide a progress report on fabricating various memory devices on flexible silicon fabric and insights for completely flexible memory modules on silicon fabric.

Keywords

CMOS memory circuits; batch processing (industrial); elemental semiconductors; flexible electronics; integrated circuit manufacture; silicon; CMOS compatible generic batch process; bulk monocrystalline silicon; bulk-inflexible silicon; flexible memory modules; fully flexible electronic systems; inorganic devices; organic devices; organic substrates; pragmatic approach; silicon semiconductor industry; ultra-high integration density; ultra-thin monocrystalline fabric; CMOS integrated circuits; CMOS technology; Metals; Nanoscale devices; Silicon; Transforms; Transistors; electronic systems; flexible electronics; memory devices; mono-crystalline silicon; semiconductor industry;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering (ICECE), 2014 International Conference on

Conference_Location

Dhaka

Print_ISBN

978-1-4799-4167-4

Type

conf

DOI

10.1109/ICECE.2014.7026822

Filename

7026822