• DocumentCode
    2511000
  • Title

    Magnetic variable reluctance mini-motor using Liga, x-ray lithography and electroplating

  • Author

    O´Sullivan, E.J. ; Cooper, E.I. ; Romankiw, Lubomyr T. ; Krongelb, S. ; Trouilloud, P. ; Hedge, S. ; Horkans, J. ; Kwietniak, K. ; Tornello, J. ; Roux, S. ; Wood, P. ; Malek, C.K. ; Ling, Zaixun

  • Author_Institution
    IBM Corp.
  • fYear
    1998
  • fDate
    6-9 Jan. 1998
  • Firstpage
    275
  • Lastpage
    275
  • Keywords
    Inductance; Magnetic films; Magnetic flux; Magnetostatic waves; Optical device fabrication; Optical films; Reluctance motors; Thin film inductors; Voltage; X-ray lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
  • Conference_Location
    San Francisco, CA, USA
  • Print_ISBN
    0-7803-5118-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1998.742400
  • Filename
    742400