Optical MEMS electrostatic actuators with various beam configurations

Author

Geetha, D. Mohana ; Madheswaran, M.

Author_Institution

Dept. of Electron. & Commun. Eng., Kumaraguru Coll. of Technolgy, Coimbatore

fYear

2008

fDate

21-24 Nov. 2008

Firstpage

757

Lastpage

760

Abstract

The electro statically actuated clamped-clamped beam and cantilever beam with ground electrodes have been simulated using finite element method (FEM) and presented in this paper. The performance analysis of both MEMS actuators have been carried out and the pull in voltages for different dimensions of the beams were estimated. The beam structural displacements, the natural frequencies for the dominant modes and the corresponding eigen values have been evaluated for different bias voltages. The results obtained show that pull in voltages can be varied from 2348 V to 772 V and the natural frequencies from 102.92 KHz to 916.35 KHz by varying the length and width of the beams.

Keywords

beams (structures); cantilevers; earth electrodes; electrostatic actuators; finite element analysis; micro-optomechanical devices; FEM; cantilever beam; electrostatically actuated clamped-clamped beam configuration; finite element method; ground electrodes; optical MEMS electrostatic actuator; Educational institutions; Electrodes; Electrostatic actuators; Frequency; Microelectromechanical devices; Micromechanical devices; Optical filters; Optical sensors; Structural beams; Voltage; MEMS/NEMS; cantilever beam; clamped-clamped beam; electrostatic actuator; pull in voltages;

fLanguage

English

Publisher

ieee

Conference_Titel

Recent Advances in Microwave Theory and Applications, 2008. MICROWAVE 2008. International Conference on

Conference_Location

Jaipur

Print_ISBN

978-1-4244-2690-4

Electronic_ISBN

978-1-4244-2691-1

Type

conf

DOI

10.1109/AMTA.2008.4763065

Filename

4763065