A 2/3 inch fully integrated active-matrix LCD with thin mesh polysilicon electrodes

Author

Yamamoto, A. ; Emoto, F. ; Fujii, E. ; Nakamura, A. ; Uemoto, Y. ; Kobayashi, K. ; Senda, K.

Author_Institution

Matsushita Electron. Corp., Osaka, Japan

fYear

1989

fDate

3-6 Dec. 1989

Firstpage

161

Lastpage

164

Abstract

A 2/3-in fully integrated active-matrix LCD (liquid-crystal-display) panel with 74240 pixels has been developed by using a pixel structure where ITO electrodes in a conventional LCD panel are replaced with thin mesh polysilicon film electrodes. The use of polysilicon electrodes not only gives increased pixel density leading to reduction of LCD panel size but also makes a conventional bulk-silicon process useful because the ITO process is omitted. By using the thin mesh polysilicon electrode, a light transmittance of 70% was obtained for an aperture ratio of 70%.<>

Keywords

CMOS integrated circuits; electrodes; elemental semiconductors; liquid crystal displays; silicon; 0.67 in; 74240 pixels; CMOS process; LCD panel size; Si; aperture ratio; bulk-silicon process; fully integrated active-matrix LCD; light transmittance; pixel density; pixel structure; thin mesh polysilicon electrodes; Active matrix liquid crystal displays; Apertures; CMOS process; Electrodes; Indium tin oxide; Laboratories; Optical films; Silicon; Thickness measurement; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1989. IEDM '89. Technical Digest., International

Conference_Location

Washington, DC, USA

ISSN

0163-1918

Print_ISBN

0-7803-0817-4

Type

conf

DOI

10.1109/IEDM.1989.74251

Filename

74251