Title :
A 2/3 inch fully integrated active-matrix LCD with thin mesh polysilicon electrodes
Author :
Yamamoto, A. ; Emoto, F. ; Fujii, E. ; Nakamura, A. ; Uemoto, Y. ; Kobayashi, K. ; Senda, K.
Author_Institution :
Matsushita Electron. Corp., Osaka, Japan
Abstract :
A 2/3-in fully integrated active-matrix LCD (liquid-crystal-display) panel with 74240 pixels has been developed by using a pixel structure where ITO electrodes in a conventional LCD panel are replaced with thin mesh polysilicon film electrodes. The use of polysilicon electrodes not only gives increased pixel density leading to reduction of LCD panel size but also makes a conventional bulk-silicon process useful because the ITO process is omitted. By using the thin mesh polysilicon electrode, a light transmittance of 70% was obtained for an aperture ratio of 70%.<>
Keywords :
CMOS integrated circuits; electrodes; elemental semiconductors; liquid crystal displays; silicon; 0.67 in; 74240 pixels; CMOS process; LCD panel size; Si; aperture ratio; bulk-silicon process; fully integrated active-matrix LCD; light transmittance; pixel density; pixel structure; thin mesh polysilicon electrodes; Active matrix liquid crystal displays; Apertures; CMOS process; Electrodes; Indium tin oxide; Laboratories; Optical films; Silicon; Thickness measurement; Thin film transistors;
Conference_Titel :
Electron Devices Meeting, 1989. IEDM '89. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1989.74251
