Title :
Reduction of surface losses of CVD diamond by passivation methods
Author :
Scherer, T.A. ; Aiello, G. ; Grossetti, G. ; Meier, A. ; Schreck, S. ; Spaeh, P. ; Strauss, D. ; Vaccaro, A. ; Siegel, M. ; Meckbach, J.M. ; Scheuring, A.
Author_Institution :
Inst. for Appl. Mater. IAM-AWP, Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
Abstract :
The high-power long pulse RF loss properties of CVD diamond windows for ECR heating and plasma stabilization in large fusion devices have been measured by established Fabry-Perot methods [1,2,3]. The dielectric loss is strongly influenced by the surface chemistry of the diamond. Special surface passivation techniques are investigated due to the reduction of the electrical surface conductivity and therefore of the RF losses.
Keywords :
chemical vapour deposition; diamond; dielectric losses; dielectric materials; passivation; plasma radiofrequency heating; surface conductivity; C; CVD; ECR heating; Fabry-Perot methods; chemical vapor deposition; diamond windows; dielectric loss; electrical surface conductivity; high-power long pulse RF loss properties; plasma stabilization; surface chemistry; surface losses; surface passivation; Conductivity; Electromagnetic heating; Loss measurement; Manganese; Microwave measurements; Passivation;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on
Conference_Location :
Wollongong, NSW
Print_ISBN :
978-1-4673-1598-2
Electronic_ISBN :
2162-2027
DOI :
10.1109/IRMMW-THz.2012.6380403
