Reduction of surface losses of CVD diamond by passivation methods

Author

Scherer, T.A. ; Aiello, G. ; Grossetti, G. ; Meier, A. ; Schreck, S. ; Spaeh, P. ; Strauss, D. ; Vaccaro, A. ; Siegel, M. ; Meckbach, J.M. ; Scheuring, A.

Author_Institution

Inst. for Appl. Mater. IAM-AWP, Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany

fYear

2012

fDate

23-28 Sept. 2012

Firstpage

1

Lastpage

2

Abstract

The high-power long pulse RF loss properties of CVD diamond windows for ECR heating and plasma stabilization in large fusion devices have been measured by established Fabry-Perot methods [1,2,3]. The dielectric loss is strongly influenced by the surface chemistry of the diamond. Special surface passivation techniques are investigated due to the reduction of the electrical surface conductivity and therefore of the RF losses.

Keywords

chemical vapour deposition; diamond; dielectric losses; dielectric materials; passivation; plasma radiofrequency heating; surface conductivity; C; CVD; ECR heating; Fabry-Perot methods; chemical vapor deposition; diamond windows; dielectric loss; electrical surface conductivity; high-power long pulse RF loss properties; plasma stabilization; surface chemistry; surface losses; surface passivation; Conductivity; Electromagnetic heating; Loss measurement; Manganese; Microwave measurements; Passivation;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2012 37th International Conference on

Conference_Location

Wollongong, NSW

ISSN

2162-2027

Print_ISBN

978-1-4673-1598-2

Electronic_ISBN

2162-2027

Type

conf

DOI

10.1109/IRMMW-THz.2012.6380403

Filename

6380403