Title :
Non-Volatile Memory Behaviour of Metal - Ferroelectric (BaTiO3Film) - Semiconductor (Si) - MFS Devices
Author :
Mansingh, Abhai ; Sreenivas, K. ; Rao, T. Sudersena
Keywords :
Dielectrics and electrical insulation; Ferroelectric films; Ferroelectric materials; Nonvolatile memory; Semiconductor films; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature;
Conference_Titel :
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location :
Bethlehem, PA, USA
DOI :
10.1109/ISAF.1986.201209