Title :
Dielectric Properties of RF Sputered Bismuth Titanate Thin Films
Author :
Ghosh, P.K. ; Bhalla, A.S. ; Cross, L.E.
Keywords :
Bismuth; Dielectric losses; Dielectric substrates; Dielectric thin films; Glass; Optical films; Plasma temperature; Radio frequency; Sputtering; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location :
Bethlehem, PA, USA
DOI :
10.1109/ISAF.1986.201214
