Title :
Preparation and Characterization of RF Sputtered BaTiO3Thin Films
Author :
Sreenivas, K. ; Mansingh, Abhai
Keywords :
Annealing; Argon; Crystallization; Grain size; Optical films; Radio frequency; Silicon; Sputtering; X-ray diffraction; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on
Conference_Location :
Bethlehem, PA, USA
DOI :
10.1109/ISAF.1986.201216
