مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2514156

Title :

Etched Piezoelectric Structures

Author :

Trolier, S. ; Geist, C. ; Safari, A. ; Newnham, R.E. ; Xu, Q.C.

fYear :

1986

fDate :

8-11 June 1986

Firstpage :

707

Lastpage :

710

Keywords :

Chemicals; Electronics industry; Etching; Piezoelectric devices; Production; Resists; Resonance; Resonant frequency; Substrates; Titanium compounds;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Applications of Ferroelectrics. 1986 Sixth IEEE International Symposium on

Conference_Location :

Bethlehem, PA, USA

Type :

conf

DOI :

10.1109/ISAF.1986.201240

Filename :

1538180

Link To Document :