Title :
Spin Valve Strain Sensor For Atomic Force Microscopy
Author :
Mamin, H.J. ; Gurney, B.A. ; Speriosu, V.S. ; Wilhoit, D.R. ; Carey, M. ; Rugar, D.
Author_Institution :
IBM Almaden Res. Ctr.
Keywords :
Atomic force microscopy; Capacitive sensors; Force sensors; Magnetic field measurement; Magnetic flux; Magnetic sensors; Magnetostatics; Magnetostriction; Polymers; Spin valves;
Conference_Titel :
MMM-Intermag Conference, 1998. Abstracts., The 7th Joint
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-5118-5
DOI :
10.1109/INTMAG.1998.742570