Title :
Electric charge 3-dimensional profile measurement in dielectrics using acoustic microscope probe head
Author :
Qin, Xiaokui ; Suzuki, Ken ; Sazaki, Masatada ; Tanaka, Yasuhiro ; Takada, Tatsuo
Author_Institution :
Pohl Inst. of Solid State Phys., Tongji Univ., Shanghai, China
Abstract :
In this paper, we report our attempt of measuring the three-dimensional space charge distribution in a PMMA plate, which is irradiated by an electron beam, using an acoustic lens by the pressure wave propagation (PWP) method
Keywords :
acoustic microscopy; charge measurement; dielectric measurement; electron beam effects; polymers; space charge; PMMA; acoustic lens; acoustic microscope probe head; dielectric plate; electron beam irradiation; pressure wave propagation method; space charge distribution; three-dimensional profile measurement; Acoustic measurements; Acoustic waves; Charge measurement; Current measurement; Dielectric measurements; Electric variables measurement; Electron beams; Lenses; Pressure measurement; Space charge;
Conference_Titel :
Conduction and Breakdown in Solid Dielectrics, 1998. ICSD '98. Proceedings of the 1998 IEEE 6th International Conference on
Conference_Location :
Vasteras
Print_ISBN :
0-7803-4237-2
DOI :
10.1109/ICSD.1998.709216
