Title :
Improvement of Resistive Switching Characteristics by Thermally Assisted Forming Process for
-Based Structure
Author :
Yu-Ting Chen ; Ting-Chang Chang ; Po-Chun Yang ; Jheng-Jie Huang ; Hsueh-Chih Tseng ; Hui-Chun Huang ; Jyun-Bao Yang ; Ann-Kuo Chu ; Der-Shin Gan ; Ming-Jinn Tsai ; Sze, Simon M.
Author_Institution :
Dept. of Photonics, Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
After high-temperature forming (HTF) and room-temperature forming treatments, the resistive switching behavior gets some improvements. The switching ratio is enhanced as the device undergoes the HTF process. Through the conduction mechanism analyses in the high-resistance state, Schottky emission and Frenkel-Poole emission are fitted. In addition, after HTF treatment, the resistance of conductive filament decreases. The different high-resistance-state characteristics in the two devices can be attributed to more oxygen ions generated by the serious damage during HTF. Finally, the switching behavior activated by low-temperature forming process is employed to confirm the model.
Keywords :
forming processes; random-access storage; silicon compounds; Frenkel-Poole emission; HTF treatment; Schottky emission; SiO2; conduction mechanism analyses; conductive filament; high-resistance state; high-resistance-state characteristics; low-temperature forming process; resistive switching characteristics; room-temperature forming treatments; thermally assisted forming process; Educational institutions; Ions; Resistance; Sun; Switches; Temperature; Tin; $hbox{SiO}_{2}$; Forming; high temperature; nonvolatile memory; resistance switch;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2232276