DocumentCode :
2517053
Title :
Changing The Nature Of Change In Semiconductor Technology
Author :
Burger, Robert M.
Author_Institution :
Semiconductor Research Corporation
fYear :
1993
fDate :
22-24 Jun 1993
Firstpage :
1
Lastpage :
1
Keywords :
Electronics industry; Integrated circuit modeling; Job shop scheduling; Lithography; Manufacturing processes; Materials testing; Random access memory; Research and development; Transistors; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nonvolatile Memory Technology Review, 1993
Print_ISBN :
0-7803-1290-2
Type :
conf
DOI :
10.1109/NVMT.1993.696933
Filename :
696933
Link To Document :
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