Title :
Changing The Nature Of Change In Semiconductor Technology
Author :
Burger, Robert M.
Author_Institution :
Semiconductor Research Corporation
Keywords :
Electronics industry; Integrated circuit modeling; Job shop scheduling; Lithography; Manufacturing processes; Materials testing; Random access memory; Research and development; Transistors; Virtual manufacturing;
Conference_Titel :
Nonvolatile Memory Technology Review, 1993
Print_ISBN :
0-7803-1290-2
DOI :
10.1109/NVMT.1993.696933