A laser display using a PZT-actuated 2D optical scanner

Author

Tani, Masanao ; Akamatsu, Masahiro ; Yasuda, Yoshiaki ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

Res. & Dev. Center, Stanley Electric Co. Ltd., Kanagawa

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

9

Lastpage

10

Abstract

We report an image projection display using a MEMS 2D optical scanner driven by the PZT unimorph actuators developed by the ADRIP method. Improved contrast ratio of optical scan speeds with relatively large angles (horizontal: optical 27 degrees at 16.4 kHz, vertical: optical 31 degrees at 77.4 Hz, frequency ratio of 210) has made it possible to project monotone bitmap animations

Keywords

arcs (electric); ion plating; laser beams; micro-optics; microactuators; microdisplays; optical projectors; optical scanners; piezoelectric actuators; sputter etching; 16.4 kHz; 2D optical scanner; 77.4 Hz; ADRIP method; MEMS; PZT unimorph actuator; arc discharge reactive ion plating; image projection display; laser display; monotone bitmap animation; optical scan speed; Actuators; Electrodes; Low voltage; Micromechanical devices; Mirrors; Optical devices; Optical films; Particle beam optics; Scanning electron microscopy; Two dimensional displays;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540050

Filename

1540050