Title :
A laser display using a PZT-actuated 2D optical scanner
Author :
Tani, Masanao ; Akamatsu, Masahiro ; Yasuda, Yoshiaki ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Res. & Dev. Center, Stanley Electric Co. Ltd., Kanagawa
Abstract :
We report an image projection display using a MEMS 2D optical scanner driven by the PZT unimorph actuators developed by the ADRIP method. Improved contrast ratio of optical scan speeds with relatively large angles (horizontal: optical 27 degrees at 16.4 kHz, vertical: optical 31 degrees at 77.4 Hz, frequency ratio of 210) has made it possible to project monotone bitmap animations
Keywords :
arcs (electric); ion plating; laser beams; micro-optics; microactuators; microdisplays; optical projectors; optical scanners; piezoelectric actuators; sputter etching; 16.4 kHz; 2D optical scanner; 77.4 Hz; ADRIP method; MEMS; PZT unimorph actuator; arc discharge reactive ion plating; image projection display; laser display; monotone bitmap animation; optical scan speed; Actuators; Electrodes; Low voltage; Micromechanical devices; Mirrors; Optical devices; Optical films; Particle beam optics; Scanning electron microscopy; Two dimensional displays;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540050
