Title :
Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism
Author :
Yoda, M. ; Isamoto, K. ; Chong, C. ; Ito, H. ; Murata, A. ; Toshiyoshi, H.
Author_Institution :
Seiko Epson Corp., Nagano
Abstract :
We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained
Keywords :
electrostatic actuators; micro-optics; mirrors; optical design techniques; optical scanners; MEMS 1-D optical scanner design; actuator-motion; angular magnifying mechanism; scan-angle magnifying mechanism; self-assembled vertical comb; two-mass-two-spring mechanism mirror angle; Actuators; Indium tin oxide; Micromechanical devices; Mirrors; Optical design; Optical device fabrication; Resonance; Resonant frequency; Stimulated emission; Two dimensional displays;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540055
