DocumentCode
2517716
Title
A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion
Author
Todd, Shane T. ; Jain, Ankur ; Qu, Hongwei ; Xie, Huikai
Author_Institution
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
27
Lastpage
28
Abstract
A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micro mirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators
Keywords
microactuators; micromirrors; optical fabrication; pistons; 3-D electrothermal micromirror; inverted-series-connected electrothermal bimorph actuator; micromirror fabrication; optical path shifting; piston; tilt motion; Biomedical optical imaging; Electrothermal effects; Micromirrors; Mirrors; Optical design; Piezoelectric actuators; Pistons; Structural beams; Temperature; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540059
Filename
1540059
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