Title :
Integrated tracking and focusing systems in a monolithic device for MEMS optical pick-up head
Author :
Wu, Mingching ; Peng, Chih-Yu ; Hsiao, Sheng-Yi ; Lin, Hung-Yi ; Fang, Weileun
Author_Institution :
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
This work proposed a novel optical pickup head with tracking and focusing system in a monolithic device. The device was fabricated by poly-Si trench-refilled technology and used UV polymer droplet as objective lens. In-plane (tracking) and out-of-plane (focusing) motion were decoupled by springs, gimbal structure, and actuators. In results, we successfully demonstrate the proposed device included single tracking system, single focusing, and integrated system. The resonant frequency of tacking and focusing systems are 9.6 kHz and 4.2 kHz respectively
Keywords :
lenses; micro-optics; micromachining; micromechanical devices; optical polymers; pick-ups; silicon; 4.2 kHz; 9.6 kHz; MEMS optical pick-up head; Si; UV polymer droplet; actuator; integrated focusing system; integrated tracking system; monolithic device; objective lens; poly-Si micromachining; poly-Si trench-refilled technology; springs; Actuators; Etching; Integrated optics; Lenses; Micromechanical devices; Optical devices; Optical films; Optical polymers; Silicon; Springs;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540062
