Integrated tracking and focusing systems in a monolithic device for MEMS optical pick-up head

Author

Wu, Mingching ; Peng, Chih-Yu ; Hsiao, Sheng-Yi ; Lin, Hung-Yi ; Fang, Weileun

Author_Institution

Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

33

Lastpage

34

Abstract

This work proposed a novel optical pickup head with tracking and focusing system in a monolithic device. The device was fabricated by poly-Si trench-refilled technology and used UV polymer droplet as objective lens. In-plane (tracking) and out-of-plane (focusing) motion were decoupled by springs, gimbal structure, and actuators. In results, we successfully demonstrate the proposed device included single tracking system, single focusing, and integrated system. The resonant frequency of tacking and focusing systems are 9.6 kHz and 4.2 kHz respectively

Keywords

lenses; micro-optics; micromachining; micromechanical devices; optical polymers; pick-ups; silicon; 4.2 kHz; 9.6 kHz; MEMS optical pick-up head; Si; UV polymer droplet; actuator; integrated focusing system; integrated tracking system; monolithic device; objective lens; poly-Si micromachining; poly-Si trench-refilled technology; springs; Actuators; Etching; Integrated optics; Lenses; Micromechanical devices; Optical devices; Optical films; Optical polymers; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540062

Filename

1540062