DocumentCode
2517845
Title
New insights on the hot-carrier characteristics of 55 nm PD SOI MOSFETs
Author
Ioannou, Dimitris P. ; Zhao, E. ; Cooper, S. ; Zhang, J. ; Jayanarayanan, S.K. ; Pham, V. ; Marathe, A. ; Ioannou, Dimitris E.
Author_Institution
Dept. of Electr. & Comput. Eng., George Mason Univ., Fairfax, VA, USA
fYear
2004
fDate
4-7 Oct. 2004
Firstpage
205
Lastpage
206
Abstract
We report hot-carrier degradation results for a 90 nm technology (Lpoly = 55 nm) partially depleted (PD) SOI MOSFETs with electrical gate oxide thickness (Inversion mode) down to 19.5 Å. In addition, this work investigates the effect of time dependent dielectric breakdown (TDDB) pre-stressing on the hot carrier behavior of these devices.
Keywords
MOSFET; elemental semiconductors; hot carriers; semiconductor device breakdown; silicon-on-insulator; 55 nm; 90 nm; Si; TDDB; electrical gate oxide thickness; hot carrier degradation; metal-oxide semiconductor field effect transistor; partially depleted SOI MOSFET; silicon-on-insulator; time dependent dielectric breakdown prestressing; Dielectric breakdown; Hot carriers; Human computer interaction; MOS devices; MOSFETs; Random access memory; Temperature dependence; Thermal conductivity; Thermal degradation; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2004. Proceedings. 2004 IEEE International
Print_ISBN
0-7803-8497-0
Type
conf
DOI
10.1109/SOI.2004.1391618
Filename
1391618
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