Title :
A 2d optical lens scanner with small footprint actuators
Author :
Takahashi, Koichi ; Kwon, H.N. ; Saruta, K. ; Mita, M. ; Lee, J.H. ; Fujita, H. ; Toshiyoshi, H.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ.
Abstract :
This paper proposes a new optical and mechanical design for an optical crossconnect using MEMS 2D lens scanner. Optical simulation justified the use of telescope optics for low loss and compact OXC design. The suspensions and the electrostatic mechanism were designed in separate SOI layers to compress the device footprint and to accommodate more optical channels
Keywords :
electrostatic actuators; lenses; micromechanical devices; optical design techniques; optical fibre communication; optical interconnections; optical scanners; silicon-on-insulator; 2D optical lens scanner; MEMS; SOI layers; electrostatic mechanism; mechanical design; optical channels; optical crossconnect; optical simulation; small footprint actuators; suspension; telescope optics; Actuators; Aerospace industry; Electrostatics; Insertion loss; Lenses; Optical design; Optical losses; Stimulated emission; Suspensions; Telescopes;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540067
