Title :
A low voltage two-step micromirror for the pinhole of the confucal microscope
Author :
Hwang, Yong-Ha ; Han, Seungoh ; Lee, Byung-Kab ; Kim, Jae-Soon ; Pak, James Jungho
Author_Institution :
Dept. of Electr. Eng., Korea Univ., Seoul
Abstract :
In this paper, a novel electrostatic two-step micromirror which can serve as a pinhole and be driven at low voltages is presented. We have designed, fabricated and tested the two-step micromirror. It has a novel structure with an intermediate moving plate. The fabricated device has successfully demonstrated the reduction of the driving voltage. The proposed micromirror can be used in low voltage optical applications such as in-vivo endoscopic biopsy
Keywords :
electrostatic devices; micromirrors; optical design techniques; optical fabrication; optical testing; confocal microscope; driving voltage; electrostatic micromirror; fabrication; in-vivo endoscopic biopsy; intermediate moving plate; low voltage two-step micromirror; testing; Biopsy; Electrodes; Electrostatics; Fabrication; Lighting; Low voltage; Micromirrors; Microscopy; Mirrors; Physics;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540070
