DocumentCode
2517939
Title
A low voltage two-step micromirror for the pinhole of the confucal microscope
Author
Hwang, Yong-Ha ; Han, Seungoh ; Lee, Byung-Kab ; Kim, Jae-Soon ; Pak, James Jungho
Author_Institution
Dept. of Electr. Eng., Korea Univ., Seoul
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
49
Lastpage
50
Abstract
In this paper, a novel electrostatic two-step micromirror which can serve as a pinhole and be driven at low voltages is presented. We have designed, fabricated and tested the two-step micromirror. It has a novel structure with an intermediate moving plate. The fabricated device has successfully demonstrated the reduction of the driving voltage. The proposed micromirror can be used in low voltage optical applications such as in-vivo endoscopic biopsy
Keywords
electrostatic devices; micromirrors; optical design techniques; optical fabrication; optical testing; confocal microscope; driving voltage; electrostatic micromirror; fabrication; in-vivo endoscopic biopsy; intermediate moving plate; low voltage two-step micromirror; testing; Biopsy; Electrodes; Electrostatics; Fabrication; Lighting; Low voltage; Micromirrors; Microscopy; Mirrors; Physics;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540070
Filename
1540070
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