Title :
Organic variable optical attenuator made by compliant fluoropolymer membrane
Author :
Yeh, Yu-Wei ; Chiu, Chen-Wei E. ; Su, Guo-Dung J.
Author_Institution :
Graduate Inst. of Electro-Opt. Eng., Nat. Taiwan Univ., Taipei
Abstract :
The paper describes the design and fabrication of micro-electro-mechanical systems (MEMS) variable optical attenuator (VOA) made by a compliant organic thin film. The optical attenuation is achieved by changing the radius of curvature of the organic thin film actuated by the electrostatic force. The simulation results show that the attenuation range can achieve 20 dB at the wavelength of 1550 nm
Keywords :
electrostatic actuators; membranes; micromechanical devices; optical attenuators; optical design techniques; optical fabrication; optical polymers; 1550 nm; actuator; electrostatic force; fluoropolymer membrane; micro-electro-mechanical systems; organic thin film; organic variable optical attenuator; Biomembranes; Micromechanical devices; Mirrors; Optical attenuators; Optical beams; Optical collimators; Optical device fabrication; Optical devices; Optical films; Transistors;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540071
