Title :
High fill-factor micromirror array and its fabrication process
Author :
Jeon, Jin-Wan ; Dae-Hyun Kim ; Yoon, Jun-Bo ; Lim, Koeng Su
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon
Abstract :
The micromirror array with high fill-factor of 91% is fabricated. For high fill-factor, the posts supporting the mirror plate are filled up with copper by the uniform electroplating process
Keywords :
copper; electroplating; micromachining; micromirrors; optical fabrication; copper; electroplating process; fabrication; fill-factor micromirror array; mirror plate; surface micromachining; Computer science; Copper; Displays; Fabrication; Micromachining; Micromirrors; Mirrors; Optical arrays; Resists; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540072
