Title :
Thermally actuated micro scanner for barcode reader applications
Author :
Khechana, Faouzi ; van Lintel, Harald ; Massieu, J.L. ; Ackley, Sprague ; Renaud, Philipe
Author_Institution :
Microsyst. Lab., Ecole Polytech. Fed. de Lausanne
Abstract :
This paper presents a low-cost 1D thermally actuated silicon micro scanner developed for our industrial partner. It was designed and optimised for mass production. With a really simple and standard fabrication process we obtained a high yield (> 95%) and good reproducibility of the scanner characteristics: low resonance frequency, good shock resistance, low power consumption, easy control, large mechanical sweep angle and a flat reflective surface
Keywords :
bar codes; electrostatic actuators; mark scanning equipment; mass production; optical fabrication; optical scanners; silicon; barcode reader; easy control; fabrication; flat reflective surface; large mechanical sweep angle; mass production; micro scanner; power consumption; resonance frequency; shock resistance; silicon; thermal actuating; Design optimization; Electric shock; Energy consumption; Fabrication; Mass production; Reproducibility of results; Resonance; Resonant frequency; Silicon; Surface resistance;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540074
