DocumentCode
2518034
Title
Optical actuation of mems micro-gears through radiation pressure
Author
Gauthier, R.C. ; Tait, R.N.
Author_Institution
Dept. of Electron., Carleton Univ., Ottawa, Ont.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
61
Lastpage
62
Abstract
The optical processes involved in laser trapping and optical manipulation are explored as a means of actuating micron-sized gear structures. It is shown that laser trapping can be used to suspend in 3-D polyimide gears and set them into rotation. Subsequently we present the light actuation of micron-sized gear structures fabricated with a polysilicon surface micro-machining technique
Keywords
actuators; laser beam machining; micromachining; micromechanical devices; optical fabrication; radiation pressure; 3-D polyimide gears; MEMS; fabrication; laser trapping; light actuation; micro-gears; optical actuation; optical manipulation; polysilicon surface micro-machining; radiation pressure; Charge carrier processes; Dielectric substrates; Electron traps; Gears; Laser beams; Micromechanical devices; Optical beams; Polyimides; Power lasers; Torque;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540076
Filename
1540076
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