DocumentCode
2518134
Title
A physically based model for dielectric charging in an integrated optical mems wavelength selective switch
Author
Nielson, Geogory N. ; Barbastathis, George
Author_Institution
Sandia Nat. Labs., Albuquerque, NM
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
69
Lastpage
70
Abstract
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch
Keywords
dielectric properties; electro-optical switches; electrostatic devices; finite element analysis; integrated optics; micro-optics; microswitches; optical communication equipment; FEA; dielectric charge accumulation; integrated optical MEMS wavelength selective switch; physical parameter based model; pull-in response; Dielectrics; Energy states; Integrated optics; Microelectromechanical devices; Micromechanical devices; Optical filters; Optical ring resonators; Optical switches; Predictive models; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540081
Filename
1540081
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