Title :
Microdevices for high resolution measurement
Author :
Manalis, Scott ; Burg, Thomas ; Sparks, Andrew
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA
Abstract :
We summarize two on-going projects: suspended microchannel resonator for biomolecular detection and scanning probe microscopy with inherent disturbance suppression. The microfabricated devices with optical readout are used for high resolution measurement
Keywords :
biological techniques; micro-optics; micromechanical resonators; molecular biophysics; scanning probe microscopy; biomolecular detection; high resolution measurement; inherent disturbance suppression; microfabricated devices; optical readout; scanning probe microscopy; suspended microchannel resonator; Biomedical optical imaging; Microchannel; Microscopy; Optical interferometry; Optical resonators; Probes; Resonance; Resonant frequency; Surfaces; Tunneling;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540084
