Title :
Roll-to-roll manufacturing technologies for flexible MEMS applications
Author :
Kololuoma, Terho ; Tuomikoski, Markus ; Haring, Timi ; Kopola, Harri
Author_Institution :
VTT Electron., Optoelectron., Oulu
Abstract :
Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced
Keywords :
manufacturing processes; micro-optics; optical fabrication; optoelectronic devices; printing; electrical structures; optical structures; printing techniques; roll-to-roll manufacturing technologies; volume-scale MEMS fabrication; Flexible manufacturing systems; Ink; Micromechanical devices; Optical device fabrication; Optical devices; Optical films; Optical sensors; Packaging; Printing; Production facilities;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540090
