DocumentCode
2518317
Title
Microreplication in a silicon processing compatible polymer material
Author
Melin, Jonas ; Hedsten, Karin ; Magnusson, Anders ; Karlén, David ; Rödjegård, Henrik ; Persson, Katrin ; Bengtsson, Jorgen ; Enoksson, Peter ; Nikolajeff, Fredrik
Author_Institution
Dept. of Eng. Sci., Uppsala Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
89
Lastpage
90
Abstract
We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytoptrade
Keywords
embossing; integrated optics; micro-optics; micromechanical devices; optical elements; optical fabrication; optical polymers; replica techniques; silicon; Cytop; amorphous fluorocarbon polymer; compatible polymer material; fabrication process; microreplication; polymer micro-optical element integration; reverse order protocol; silicon; silicon processing; Etching; Lenses; Nickel; Optical device fabrication; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Silicon; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540091
Filename
1540091
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