Title :
Mirror with two parallel rotation axes for external cavity laser
Author :
Ishimori, M. ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique
Keywords :
laser beams; laser cavity resonators; laser mirrors; laser tuning; microactuators; micromirrors; optical fabrication; optical rotation; semiconductor lasers; silicon-on-insulator; MEMS; SOI; Si-SiO2; comb drive actuator; external cavity diode laser fabrication; laser tuning; mechanical linkage; mirror device; mirror motion; mode hop free tuning; parallel rotation axes; tunable laser; virtual pivot point; wafer-folding technique; Actuators; Diode lasers; Distributed feedback devices; Laser feedback; Laser modes; Laser tuning; Micromechanical devices; Mirrors; Optical tuning; Tunable circuits and devices;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540093
