DocumentCode
2518387
Title
An in-plane dispersive system utilizing micro tunable vertical grating
Author
Hsieh, Jerwei ; Hsiao, Sheng-Yi ; Yin, Hung-Lin ; Chen, Wen-Chih ; Weng, Chun-Jen ; Lin, Yu-Hsin ; Fang, Weileun ; Shieh, Kuen-Wey
Author_Institution
Instrum. Technol. Res. Center, Nat. Appl. Res. Lab., Hsinchu
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
97
Lastpage
98
Abstract
A miniaturized tunable dispersive optical system is presented, which consisted of a novel tunable vertical grating operated in the visible. Preliminary results for fabricating and testing such device are also conducted to prove the feasibility
Keywords
diffraction gratings; micro-optics; micromechanical devices; optical dispersion; optical tuning; device fabrication; device testing; in-plane dispersive system; linearly modulated light; micro tunable vertical grating; miniaturized tunable dispersive optical system; pitch-tunable grating; Apertures; Dispersion; Gratings; Instruments; Laboratories; Optical design; Optical devices; Optical modulation; Optical tuning; Teeth;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540095
Filename
1540095
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