Title :
An in-plane dispersive system utilizing micro tunable vertical grating
Author :
Hsieh, Jerwei ; Hsiao, Sheng-Yi ; Yin, Hung-Lin ; Chen, Wen-Chih ; Weng, Chun-Jen ; Lin, Yu-Hsin ; Fang, Weileun ; Shieh, Kuen-Wey
Author_Institution :
Instrum. Technol. Res. Center, Nat. Appl. Res. Lab., Hsinchu
Abstract :
A miniaturized tunable dispersive optical system is presented, which consisted of a novel tunable vertical grating operated in the visible. Preliminary results for fabricating and testing such device are also conducted to prove the feasibility
Keywords :
diffraction gratings; micro-optics; micromechanical devices; optical dispersion; optical tuning; device fabrication; device testing; in-plane dispersive system; linearly modulated light; micro tunable vertical grating; miniaturized tunable dispersive optical system; pitch-tunable grating; Apertures; Dispersion; Gratings; Instruments; Laboratories; Optical design; Optical devices; Optical modulation; Optical tuning; Teeth;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540095
