Title :
MEMS compatible micro-GRIN lenses for in plane beam manipulation
Author :
Zickar, Michael ; Oudalov, Alexander ; Noell, Wilfried ; Marxer, Cornel ; De Rooij, Nico
Author_Institution :
Neuchatel Univ.
Abstract :
The design, simulation, fabrication and characterization of micro-GRIN lenses with a diameter of 125 mum is presented. GRIN rods having the same diameter as optical fibers can be passively aligned using U-grooves and microfabricated springs
Keywords :
gradient index optics; microlenses; micromechanical devices; optical fabrication; optical fibres; springs (mechanical); 125 micron; MEMS compatible microGRIN lenses characterization; U-grooves; in plane beam manipulation; microGRIN lenses design; microGRIN lenses fabrication; microGRIN lenses simulation; microfabricated springs; optical fibers; Lenses; Micromechanical devices; Optical collimators; Optical design; Optical device fabrication; Optical devices; Optical fibers; Optical losses; Optical refraction; Springs;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540103
