Title :
Design and fabrication of MEMS optical modulators integrated with PHC waveguides
Author :
Higo, Akio ; Iwamoto, Satoshi ; Ishida, Makoto ; Arakawa, Yasuhiko ; Fujita, Hideaki ; Toshiyoshi, Hiroshi ; Gomyo, A. ; Tokushima, Masatoshi ; Yamada, Hiroyoshi
Author_Institution :
Inst. for Ind. Sci., Tokyo Univ.
Abstract :
We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86 V with -27 dB insertion loss
Keywords :
electrostatic actuators; integrated optics; micro-optics; optical attenuators; optical design techniques; optical modulation; optical waveguides; photonic crystals; silicon-on-insulator; 27 dB; 86 V; HF; MEMS actuator fabrication process; MEMS optical modulator design; PhC waveguides; SOI PhC layer; Si-SiO2; electrostatic actuators; optical attenuators; two-dimensional photonic crystal waveguide; Actuators; Integrated optics; Micromechanical devices; Optical attenuators; Optical design; Optical device fabrication; Optical modulation; Optical waveguides; Photonic crystals; Process design;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540104
