Title :
Optical MEMS for advanced spectrometers
Author :
Schenk, Harald ; Gruger, H. ; Zimmer, Fabian ; Scherf, Werner ; Kenda, Andreas
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst., Villach
Abstract :
Optical MEMS based spectrometers capable to perform time resolved measurements from VIS to NIR are presented. They are based on high frequency scanning gratings with V-groove-structure and translational mirrors for Fourier-transform-spectrometers, respectively
Keywords :
Fourier transform spectrometers; diffraction gratings; infrared spectrometers; micromirrors; visible spectrometers; Fourier transform spectrometers; NIR; V-groove-structure; VIS; high frequency scanning gratings; optical MEMS; time resolved measurements; translational mirrors; Diffraction gratings; Laser beams; Micromechanical devices; Mirrors; Optical interferometry; Optical modulation; Optical sensors; Spectroscopy; Springs; Time measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540106
