Imaging micro-spectrometer with adaptive space-variant dispersion

Author

Zhou, W. ; Shield, E. ; Liu, W. ; Leger, J. ; Talghader, J.

Author_Institution

Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

121

Lastpage

122

Abstract

A space-variant variable-dispersion imaging micro-spectrometer is described. An array of MEMs mirrors is used to select different optical paths through the spectrometer, permitting dynamically adjustable grating dispersion on a pixel-by-pixel basis across the image. Diffraction-limited performance is achieved across the 500-1000 nm wavelength range; and spectral resolutions ranging from 5 to 20 nm

Keywords

diffraction gratings; micromirrors; optical dispersion; spectrometers; 500 to 1000 nm; MEMs mirrors; adaptive space-variant dispersion; adjustable grating dispersion; imaging microspectrometer; optical paths; Gratings; Image resolution; Mirrors; Optical arrays; Optical imaging; Optical sensors; Pixel; Resists; Spectroscopy; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540108

Filename

1540108

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2518647