Title :
Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror
Author :
Sasaki, Minoru ; Yuuki, Shinya ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai
Abstract :
A micromirror device is developed realizing the large-rotation and the low-voltage driving (obtained maximum value is 8.6 degrees at 5 V). The thin film torsion bars, which consist of SiN and Au/Cr films, contribute to this performance. Inside the torsion bar, the tension is included for generating the compliance in the mirror rotation and stiffness in other movements. The performance of the torsion bar is investigated
Keywords :
chromium alloys; gold alloys; micromirrors; optical rotation; silicon compounds; torsion; wide band gap semiconductors; 5 V; AuCr; SiN; low-voltage micromirror driving; micromirror rotation; stiffness; tense thin film torsion bar; Bars; Chromium; Etching; Gold; Micromirrors; Mirrors; Silicon compounds; Springs; Tensile stress; Transistors;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540112
