Title :
Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits
Author :
Chi, Chao-Hsi ; Tsai, Jui-che ; Hah, Dooyoung ; Jeong, Ki- Hun ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
Abstract :
We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved
Keywords :
micromirrors; optical planar waveguides; silicon; MEMS-based on-chip solid-immersion micromirror; Si; angular deflection; diffraction loss; mechanical scan angle; rotary comb-drive actuators; silicon-based planar lightwave circuits; Circuits; Micromechanical devices; Micromirrors; Mirrors; Optical diffraction; Optical losses; Optical refraction; Pneumatic actuators; Programmable control; Slabs;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540113
