Title :
Periodic rib-reinforced silicon nitride scan mirrors
Author :
Lutzenberger, B. Jeffrey ; Dickensheets, David L. ; Himmer, Phillip A.
Author_Institution :
Dept. of Electr. & Comput. Eng.,, Montana State Univ., Bozeman, MT
Abstract :
Uniaxial scan mirrors measuring 1500 um in diameter were fabricated from a 1.4 um thick rib-reinforced silicon nitride film. The structurally enhanced film minimized surface deformation due to internal stress and inertial effects during actuation
Keywords :
deformation; internal stresses; micromirrors; silicon compounds; 1.4 micron; 1500 micron; SiN; internal stress; periodic rib-reinforced silicon nitride film; surface deformation; uniaxial scan micromirrors; Conducting materials; Etching; Mirrors; Nanofabrication; Optical films; Residual stresses; Resonance; Semiconductor films; Silicon; Transistors;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540114
