• DocumentCode
    2518762
  • Title

    Periodic rib-reinforced silicon nitride scan mirrors

  • Author

    Lutzenberger, B. Jeffrey ; Dickensheets, David L. ; Himmer, Phillip A.

  • Author_Institution
    Dept. of Electr. & Comput. Eng.,, Montana State Univ., Bozeman, MT
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    133
  • Lastpage
    134
  • Abstract
    Uniaxial scan mirrors measuring 1500 um in diameter were fabricated from a 1.4 um thick rib-reinforced silicon nitride film. The structurally enhanced film minimized surface deformation due to internal stress and inertial effects during actuation
  • Keywords
    deformation; internal stresses; micromirrors; silicon compounds; 1.4 micron; 1500 micron; SiN; internal stress; periodic rib-reinforced silicon nitride film; surface deformation; uniaxial scan micromirrors; Conducting materials; Etching; Mirrors; Nanofabrication; Optical films; Residual stresses; Resonance; Semiconductor films; Silicon; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540114
  • Filename
    1540114
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2518762