Title :
Measurement and calculation of laser beam spot distortion caused by dynamic deformation of scanning mirror
Author :
Miyagawa, S. ; Sugioka, H. ; Torashima, K. ; Furukawa, Y. ; Yagi, T.
Author_Institution :
NEMS Platform Res. Div., Leading-Edge Technol. Dev. Headquarters, Kanagawa
Abstract :
We report the measurement and calculation results of a laser beam spot distortion caused by dynamic deformation of a MEMS scanning mirror. The laser beam spot distortion is measured by using the CCD camera located on focal point when an emission timing of the laser beam is synchronized with a motion of the scanning mirror. The calculated distortion is simulated by using the Fresnel-Kirchhoff diffraction formula. A dynamic deformation of the mirror is calculated by FEM. Their results have showed good agreement. Therefore we have proved our calculation method available
Keywords :
CCD image sensors; Fresnel diffraction; finite element analysis; laser beams; micromirrors; microsensors; CCD camera; FEM; Fresnel-Kirchhoff diffraction formula; MEMS scanning mirror; dynamic deformation; finite element method; focal point; laser beam spot distortion; Charge coupled devices; Charge-coupled image sensors; Diffraction; Distortion measurement; Laser beams; Laser noise; Micromechanical devices; Mirrors; Motion measurement; Timing;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540116
