DocumentCode
2518825
Title
Optical properties and applications of porous silicon
Author
Pap, Andrea Edit ; Kordás, Krisztian ; Vähäkangas, Jouko ; Uusimäki, Antti
Author_Institution
Dept. of Electr. & Inf. Eng., Oulu Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
139
Lastpage
140
Abstract
The paper summarizes the optical properties of porous silicon membranes synthesized by anodic etching of p+ Si wafers. The dependence of optical properties on the structural parameters-determined by the experimental conditions-is emphasized; and the potential applications of porous silicon are presented
Keywords
elemental semiconductors; etching; porous semiconductors; silicon; Si; anodic etching; optical properties; p+ Si wafers; porous silicon membrane; potential application; structural parameters; Biomembranes; Doping; Etching; Hafnium; Microelectronics; Optical films; Optical refraction; Optical variables control; Physics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540117
Filename
1540117
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