Title :
Optical properties and applications of porous silicon
Author :
Pap, Andrea Edit ; Kordás, Krisztian ; Vähäkangas, Jouko ; Uusimäki, Antti
Author_Institution :
Dept. of Electr. & Inf. Eng., Oulu Univ.
Abstract :
The paper summarizes the optical properties of porous silicon membranes synthesized by anodic etching of p+ Si wafers. The dependence of optical properties on the structural parameters-determined by the experimental conditions-is emphasized; and the potential applications of porous silicon are presented
Keywords :
elemental semiconductors; etching; porous semiconductors; silicon; Si; anodic etching; optical properties; p+ Si wafers; porous silicon membrane; potential application; structural parameters; Biomembranes; Doping; Etching; Hafnium; Microelectronics; Optical films; Optical refraction; Optical variables control; Physics; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540117
