Title :
A simple technique for the simulation of capacitive pressure transducers
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
This paper presents a simple technique which is capable of representing the relationship between diaphragm deflection and capacitance change with pressure in closed form expression for square clamped-edge thin silicon diaphragm capacitive pressure transducer.
Keywords :
capacitive sensors; diaphragms; microsensors; pressure transducers; Si; capacitance; capacitive pressure transducer; diaphragm deflection; square clamped-edge thin silicon diaphragm; Biomedical transducers; Capacitance; Glass; Industrial relations; Piezoresistance; Piezoresistive devices; Silicon; Stress; Temperature sensors; Voltage;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2002. APEIE 2002. 2002 6th International Conference on Actual Problems of
Print_ISBN :
0-7803-7361-8
DOI :
10.1109/APEIE.2002.1075776
