DocumentCode
2518830
Title
A simple technique for the simulation of capacitive pressure transducers
Author
Dragunov, V.P.
Author_Institution
Novosibirsk State Tech. Univ., Russia
fYear
2002
fDate
23-26 Sept. 2002
Firstpage
11
Lastpage
14
Abstract
This paper presents a simple technique which is capable of representing the relationship between diaphragm deflection and capacitance change with pressure in closed form expression for square clamped-edge thin silicon diaphragm capacitive pressure transducer.
Keywords
capacitive sensors; diaphragms; microsensors; pressure transducers; Si; capacitance; capacitive pressure transducer; diaphragm deflection; square clamped-edge thin silicon diaphragm; Biomedical transducers; Capacitance; Glass; Industrial relations; Piezoresistance; Piezoresistive devices; Silicon; Stress; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering Proceedings, 2002. APEIE 2002. 2002 6th International Conference on Actual Problems of
Print_ISBN
0-7803-7361-8
Type
conf
DOI
10.1109/APEIE.2002.1075776
Filename
1075776
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