DocumentCode
2518844
Title
Patterned gas absorbing films for assuring long-term reliability and improving performances of mems and omems
Author
Longoni, G. ; Moraja, M. ; Amiotti, M.
Author_Institution
SAES Getters S.p.A., Lainate
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
143
Lastpage
144
Abstract
Microsensor packaging is one of the most important and challenging technology areas. Many microelectro-mechanical systems (MEMS) and optical MEMS (OMEMS) need to be protected from outside environment stresses: therefore the package must provide an interior environment compatible with the device operation, performances, reliability and lifetime. In addition some MEMS need a specific gas or pressure environment within the package to operate as specified: in particular, OMEMS should be protected against moisture related failures
Keywords
micro-optics; microsensors; optical films; optical materials; OMEMS; long-term reliability; microelectro-mechanical systems; microsensor packaging; optical MEMS; patterned gas absorbing films; pressure environment; Chemical technology; Filling; Gettering; Glass; Hermetic seals; Micromechanical devices; Moisture; Packaging; Semiconductor films; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540119
Filename
1540119
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