Title :
Characteristics of coupled microcircular lasers confined by insulator SiO2 and metal layer with an output waveguide
Author :
Lin, Jian-Dong ; Huang, Yong-Zhen ; Yao, Qi-Feng ; Lv, Xiao-Meng ; Yang, Yue-De ; Xiao, Jin-Long ; Du, Yun
Author_Institution :
State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
Abstract :
Coupled microcircular lasers with an output waveguide laterally confined by insulator SiO2 and p-electrode metal are fabricated by conventional photolithography and inductively coupled-plasma etching technique. Mode characteristics are numerically investigated by FDTD technique.
Keywords :
arsenic compounds; gallium compounds; gold; indium compounds; integrated optics; microcavities; microcavity lasers; optical fabrication; optical waveguides; photolithography; semiconductor lasers; silicon compounds; sputter etching; titanium; FDTD; GaInAsP-InP; Ti-Au-SiO2; coupled microcircular lasers; inductively coupled-plasma etching; insulator layer; metal layer; microcircular resonators; mode characteristics; optical fabrication; output waveguide; p-electrode metal; photolithography; Finite difference methods; Laser modes; Metals; Optical waveguides; Semiconductor lasers; Time domain analysis; Waveguide lasers; coupled modes; microcircular lasers; whispering-gallery modes;
Conference_Titel :
Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-8393-8
Electronic_ISBN :
978-1-4244-8392-1
DOI :
10.1109/AOM.2010.5713544
