Title :
Honeycomb textured front surface of monocrystalline silicon and borosilicate glass substrates
Author :
Manea, Elena ; Budianu, E. ; Purica, M. ; Cernica, I. ; Ciuciumis, A. ; Babarada, Fl
Author_Institution :
Dept. of Technol., Nat. Inst. for R&D in Microtechnol., Bucharest
Abstract :
We present the results of an experimental study regarding the increase of the silicon solar cells efficiency by texturing the front surface and the fabrication of microcells on borosilicate glass substrate using silicon micromachining technologies. A `honeycomb´ textured front surface has been obtained using a photolithography process to generate patterns (disc hole) on the top surface followed by isotropic etching
Keywords :
borosilicate glasses; elemental semiconductors; etching; honeycomb structures; micro-optics; micromechanical devices; optical fabrication; optical glass; photolithography; silicon; solar cells; B2O3-SiO2; Si; borosilicate glass substrate; honeycomb textured front surface; isotropic etching; microcells fabrication; monocrystalline silicon; photolithography process; silicon micromachining technology; silicon solar cells efficiency; Etching; Fabrication; Glass; Lithography; Microcell networks; Micromachining; Photovoltaic cells; Silicon; Solar power generation; Surface texture;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540121
