A laser-interferometer measuring displacement with nanometer resolution

Author

Zagar, Bernhard G.

Author_Institution

Inst. for General Electr. Eng. & Electr. Meas., Tech. Univ. Graz, Austria

fYear

1993

fDate

18-20 May 1993

Firstpage

410

Lastpage

415

Abstract

In material science there are certain classes of problems that require strain measurement over base lengths as small as 100 μm and still demand a resolution limit of about 10 microstrains. The author presents an interferometric strain sensor that is able to cope with that demand. The optical principle is given and the digital signal processing involved is detailed. Some experimental data for crack-tip opening displacement measurements on micro cracks and the measurement of thermal dilatation coefficients of copper are given

Keywords

CCD image sensors; crack detection; displacement measurement; image processing; light interferometers; strain measurement; thermal expansion measurement; thermal variables measurement; Cu; crack-tip; digital signal processing; laser-interferometer; material science; micro cracks; nanometer resolution; opening displacement measurements; strain measurement; strain sensor; thermal dilatation coefficients; Capacitive sensors; Digital signal processing; Displacement measurement; Laser theory; Materials science and technology; Optical interferometry; Optical sensors; Optical signal processing; Signal resolution; Strain measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1993. IMTC/93. Conference Record., IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-1229-5

Type

conf

DOI

10.1109/IMTC.1993.382608

Filename

382608