Title :
Application of phase locking loop control for mems resonant devices
Author :
Wang, Chuanwei ; Yu, Hung-Hsiu ; Tsou, Chingfu ; Fang, Weileun
Author_Institution :
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
The phase locking control method to ensure the operating of MEMS actuators at their resonant frequency is presented. In this study, the control algorithm was simulated by the MATLAB. Further, an optical scanner fabricated using the SOI wafer was employed to demonstrate the present technique. Thus the variation of the scanning angle resulted from the offset of the natural frequency of the devices can be prevented
Keywords :
digital signal processing chips; microactuators; micromirrors; optical control; optical phase locked loops; optical scanners; silicon-on-insulator; MATLAB; MEMS actuators; MEMS resonant devices; SOI wafer; Si-SiO2; control algorithm; digital signal processor; natural frequency; optical scanner; phase locking loop control method; resonant frequency; torsional mirror; Automatic control; Digital signal processing; MATLAB; Micromechanical devices; Mirrors; Phase locked loops; Resonance; Resonant frequency; Testing; Voltage-controlled oscillators;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540130
