DocumentCode
2519060
Title
Application of phase locking loop control for mems resonant devices
Author
Wang, Chuanwei ; Yu, Hung-Hsiu ; Tsou, Chingfu ; Fang, Weileun
Author_Institution
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
165
Lastpage
166
Abstract
The phase locking control method to ensure the operating of MEMS actuators at their resonant frequency is presented. In this study, the control algorithm was simulated by the MATLAB. Further, an optical scanner fabricated using the SOI wafer was employed to demonstrate the present technique. Thus the variation of the scanning angle resulted from the offset of the natural frequency of the devices can be prevented
Keywords
digital signal processing chips; microactuators; micromirrors; optical control; optical phase locked loops; optical scanners; silicon-on-insulator; MATLAB; MEMS actuators; MEMS resonant devices; SOI wafer; Si-SiO2; control algorithm; digital signal processor; natural frequency; optical scanner; phase locking loop control method; resonant frequency; torsional mirror; Automatic control; Digital signal processing; MATLAB; Micromechanical devices; Mirrors; Phase locked loops; Resonance; Resonant frequency; Testing; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540130
Filename
1540130
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